Design of Dynamic Gravity Compensator for Long-Stroke Maglev Planar Motor

This paper proposes an open structure dynamic gravity compensator to address the dynamic performance bottleneck caused by the vertical suspension current occupying the horizontal driving resources of the maglev lithography machine's macro stage. This design breaks through the stroke limitation of traditional closed gravity compensator, achieving a stable compensation force of 7 3 N (fluctuation ≤ 3.4 %) while significantly improving the available margin of horizontal driving current. The experiment shows that the compensator can control the output fluctuation in the z-direction within 3. 4 % and the disturbance force in the x/y direction below ± 3. 1 N during large stroke motion in the x/y. Combined with the dual loop PID motor control strategy, the system effectively reduces the energy consumption of the vertical electromagnetic bearing, providing key technical support for improving response speed, and anti-interference ability of the macro platform, and providing a feasible solution to the problem of gravity dynamic compensation in long stroke magnetic levitation motion platforms.