Design of a topology nano-positioning stage

Tao Chen; Li Guo Chen; Ming Qiang Pan; Li Ning Sun

doi:10.4028/www.scientific.net/AMR.211-212.891

Design of a topology nano-positioning stage

Tao Chen^*
, Li Guo Chen
, Ming Qiang Pan
, Li Ning Sun

^*Corresponding author for this work

Soochow University
Chinese Academy of Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro-technology equipment and manufacture. This paper presents a one-dimensional positioning system, adopting a PZT piezoelectric ceramic nano-positioning stage designed by multi-objective topological optimal synthesis. In order to obtain better performance, wedge-shaped structure has been applied as a precise pretension for the piezoelectric ceramic. Through finite element simulation and experimental verification, better static performance and smaller kinetic coupling are achieved, with up to 10 μm stroke displacement output and 5 nm resolution. This stage provides a novel, flexible, and efficient way in the design and optimization of the nano-positioning system.

Original language	English
Title of host publication	Mechatronics and Intelligent Materials
Pages	891-894
Number of pages	4
DOIs	https://doi.org/10.4028/www.scientific.net/AMR.211-212.891
State	Published - 2011
Externally published	Yes
Event	2011 International Conference on Mechatronics and Intelligent Materials, MIM 2011 - Lijiang, China Duration: 21 May 2011 → 22 May 2011

Publication series

Name	Advanced Materials Research
Volume	211-212
ISSN (Print)	1022-6680

Conference

Conference	2011 International Conference on Mechatronics and Intelligent Materials, MIM 2011
Country/Territory	China
City	Lijiang
Period	21/05/11 → 22/05/11

Keywords

Micro-drive
Nano-positioning stage
Piezoelectric ceramic
Topology design

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10.4028/www.scientific.net/AMR.211-212.891

Cite this

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title = "Design of a topology nano-positioning stage",

abstract = "Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro-technology equipment and manufacture. This paper presents a one-dimensional positioning system, adopting a PZT piezoelectric ceramic nano-positioning stage designed by multi-objective topological optimal synthesis. In order to obtain better performance, wedge-shaped structure has been applied as a precise pretension for the piezoelectric ceramic. Through finite element simulation and experimental verification, better static performance and smaller kinetic coupling are achieved, with up to 10 μm stroke displacement output and 5 nm resolution. This stage provides a novel, flexible, and efficient way in the design and optimization of the nano-positioning system.",

keywords = "Micro-drive, Nano-positioning stage, Piezoelectric ceramic, Topology design",

author = "Tao Chen and Chen, \{Li Guo\} and Pan, \{Ming Qiang\} and Sun, \{Li Ning\}",

year = "2011",

doi = "10.4028/www.scientific.net/AMR.211-212.891",

language = "英语",

isbn = "9783037850695",

series = "Advanced Materials Research",

pages = "891--894",

booktitle = "Mechatronics and Intelligent Materials",

note = "2011 International Conference on Mechatronics and Intelligent Materials, MIM 2011 ; Conference date: 21-05-2011 Through 22-05-2011",

}

TY - GEN

T1 - Design of a topology nano-positioning stage

AU - Chen, Tao

AU - Chen, Li Guo

AU - Pan, Ming Qiang

AU - Sun, Li Ning

PY - 2011

Y1 - 2011

N2 - Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro-technology equipment and manufacture. This paper presents a one-dimensional positioning system, adopting a PZT piezoelectric ceramic nano-positioning stage designed by multi-objective topological optimal synthesis. In order to obtain better performance, wedge-shaped structure has been applied as a precise pretension for the piezoelectric ceramic. Through finite element simulation and experimental verification, better static performance and smaller kinetic coupling are achieved, with up to 10 μm stroke displacement output and 5 nm resolution. This stage provides a novel, flexible, and efficient way in the design and optimization of the nano-positioning system.

AB - Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro-technology equipment and manufacture. This paper presents a one-dimensional positioning system, adopting a PZT piezoelectric ceramic nano-positioning stage designed by multi-objective topological optimal synthesis. In order to obtain better performance, wedge-shaped structure has been applied as a precise pretension for the piezoelectric ceramic. Through finite element simulation and experimental verification, better static performance and smaller kinetic coupling are achieved, with up to 10 μm stroke displacement output and 5 nm resolution. This stage provides a novel, flexible, and efficient way in the design and optimization of the nano-positioning system.

KW - Micro-drive

KW - Nano-positioning stage

KW - Piezoelectric ceramic

KW - Topology design

UR - https://www.scopus.com/pages/publications/79952761232

U2 - 10.4028/www.scientific.net/AMR.211-212.891

DO - 10.4028/www.scientific.net/AMR.211-212.891

M3 - 会议稿件

AN - SCOPUS:79952761232

SN - 9783037850695

T3 - Advanced Materials Research

SP - 891

EP - 894

BT - Mechatronics and Intelligent Materials

T2 - 2011 International Conference on Mechatronics and Intelligent Materials, MIM 2011

Y2 - 21 May 2011 through 22 May 2011

ER -

Design of a topology nano-positioning stage

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Keywords

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