@inproceedings{7a4906f2d3294bd9a8474b5cb417d6de,
title = "Design of a SEM compatible slip-stick nano-positioner with high bearing capacity",
abstract = "This paper presents a new structure of slip-stick positioner with a high bearing capacity, which is designed according to the requirement of nano-manipulation in the Scanning Electron Microscope (SEM). In addition, to analyze the performance of the slip-stick positioner, a dynamic model is developed in MATLAB/Simulink. The experimental results demonstrate the excellent performance of this positioner and especially its bearing capacity can be up to 400g.",
keywords = "Dynamic model, Nano-manipulation, SEM, Slip-stick",
author = "Weibin Rong and Miao Yu and Shizhong Zhang and Lefeng Wang and Lining Sun",
year = "2012",
doi = "10.4028/www.scientific.net/AMR.433-440.3052",
language = "英语",
isbn = "9783037853191",
series = "Advanced Materials Research",
pages = "3052--3059",
booktitle = "Materials Science and Information Technology, MSIT2011",
note = "2011 International Conference on Material Science and Information Technology, MSIT2011 ; Conference date: 16-09-2011 Through 18-09-2011",
}