Design of a novel micromachined gyroscope with compensatory capacitance

Weiping Chen; Hong Chen; Tian Han; Xiaowei Liu; Hongyu Wang

doi:10.4028/0-87849-456-1.2778

Design of a novel micromachined gyroscope with compensatory capacitance

Weiping Chen^*
, Hong Chen
, Tian Han
, Xiaowei Liu
, Hongyu Wang

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper presents a novel bulk micromachined gyroscope with the compensatory capacitance. Independent driving and sensing beams and a dual-frame structure are adopted to decouple mechanically for stable operation. The method of electrostatic push-pull drive and capacitive sense combs based on the slide film damping are applied to obtain a large driving force and high quality factors. The compensator)' capacitance is designed to compensate the deviations of sensing differential capacitance from fabrications. The designed gyroscope has matched resonant frequencies of 2187Hz and 2206Hz for the drive and sense modes, respectively. Considering the noise of interface circuits, the gyroscope system sensitivity can reach 1 4.2mv/°/s, theoretically.

Original language	English
Pages (from-to)	2778-2781
Number of pages	4
Journal	Key Engineering Materials
Volume	353-358
Issue number	PART 4
DOIs	https://doi.org/10.4028/0-87849-456-1.2778
State	Published - 2007
Event	Asian Pacific Conference for Fracture and Strength (APCFS'06) - Sanya, Hainan Island, China Duration: 22 Nov 2006 → 25 Nov 2006

Keywords

Compensatory capacitance
MEMS
Micro machined gyroscope

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10.4028/0-87849-456-1.2778

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title = "Design of a novel micromachined gyroscope with compensatory capacitance",

abstract = "This paper presents a novel bulk micromachined gyroscope with the compensatory capacitance. Independent driving and sensing beams and a dual-frame structure are adopted to decouple mechanically for stable operation. The method of electrostatic push-pull drive and capacitive sense combs based on the slide film damping are applied to obtain a large driving force and high quality factors. The compensator)' capacitance is designed to compensate the deviations of sensing differential capacitance from fabrications. The designed gyroscope has matched resonant frequencies of 2187Hz and 2206Hz for the drive and sense modes, respectively. Considering the noise of interface circuits, the gyroscope system sensitivity can reach 1 4.2mv/°/s, theoretically.",

keywords = "Compensatory capacitance, MEMS, Micro machined gyroscope",

author = "Weiping Chen and Hong Chen and Tian Han and Xiaowei Liu and Hongyu Wang",

year = "2007",

doi = "10.4028/0-87849-456-1.2778",

language = "英语",

volume = "353-358",

pages = "2778--2781",

journal = "Key Engineering Materials",

issn = "1013-9826",

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note = "Asian Pacific Conference for Fracture and Strength (APCFS'06) ; Conference date: 22-11-2006 Through 25-11-2006",

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T1 - Design of a novel micromachined gyroscope with compensatory capacitance

AU - Chen, Weiping

AU - Chen, Hong

AU - Han, Tian

AU - Liu, Xiaowei

AU - Wang, Hongyu

PY - 2007

Y1 - 2007

N2 - This paper presents a novel bulk micromachined gyroscope with the compensatory capacitance. Independent driving and sensing beams and a dual-frame structure are adopted to decouple mechanically for stable operation. The method of electrostatic push-pull drive and capacitive sense combs based on the slide film damping are applied to obtain a large driving force and high quality factors. The compensator)' capacitance is designed to compensate the deviations of sensing differential capacitance from fabrications. The designed gyroscope has matched resonant frequencies of 2187Hz and 2206Hz for the drive and sense modes, respectively. Considering the noise of interface circuits, the gyroscope system sensitivity can reach 1 4.2mv/°/s, theoretically.

AB - This paper presents a novel bulk micromachined gyroscope with the compensatory capacitance. Independent driving and sensing beams and a dual-frame structure are adopted to decouple mechanically for stable operation. The method of electrostatic push-pull drive and capacitive sense combs based on the slide film damping are applied to obtain a large driving force and high quality factors. The compensator)' capacitance is designed to compensate the deviations of sensing differential capacitance from fabrications. The designed gyroscope has matched resonant frequencies of 2187Hz and 2206Hz for the drive and sense modes, respectively. Considering the noise of interface circuits, the gyroscope system sensitivity can reach 1 4.2mv/°/s, theoretically.

KW - Compensatory capacitance

KW - MEMS

KW - Micro machined gyroscope

UR - https://www.scopus.com/pages/publications/36048960755

U2 - 10.4028/0-87849-456-1.2778

DO - 10.4028/0-87849-456-1.2778

M3 - 会议文章

AN - SCOPUS:36048960755

SN - 1013-9826

VL - 353-358

SP - 2778

EP - 2781

JO - Key Engineering Materials

JF - Key Engineering Materials

IS - PART 4

T2 - Asian Pacific Conference for Fracture and Strength (APCFS'06)

Y2 - 22 November 2006 through 25 November 2006

ER -

Design of a novel micromachined gyroscope with compensatory capacitance

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