@inproceedings{fb23b986865c472a9e5d321a44ae6fa7,
title = "Design of a micro-nano positioning platform based on stick-slip driving",
abstract = "Micro-nano positioning platform is a core component for micro-nano operation. The static and dynamic characteristics of platform will determine its precision level. This paper presented a new 2-D micro-nano platform based on stick-slip driving. By using static structural module and modal analysis module of ANSYS software, the stress and natural frequency of pedestal were analyzed. The driving frequency of piezoelectric ceramic was selected far away from the natural frequency to avoid resonance. Dynamic performance of pedestal was also analyzed with ANSYS transient module. Simulation results show that the presented platform has excellent static and dynamic performance.",
keywords = "Micro-nano platform, SEM, Simulation, Stick-slip",
author = "Guo, \{Qian Cheng\} and Liu, \{Shou Bin\} and Rong, \{Wei Bin\}",
year = "2014",
doi = "10.4028/www.scientific.net/AMM.618.593",
language = "英语",
isbn = "9783038352044",
series = "Applied Mechanics and Materials",
publisher = "Trans Tech Publications Ltd",
pages = "593--597",
booktitle = "Materials, Machines and Development of Technologies for Industrial Production",
address = "瑞士",
note = "2014 International Conference on Advanced Nano-Technology and Biomedical Material, ANTBM 2014 ; Conference date: 29-06-2014 Through 30-06-2014",
}