Design of 3-DOF planar nano-positioning platform with 3-PRR structure

A 3-DOF nano-positioning platform detected by strain gauges driven by piezoelectric ceramics based on orientation of plate hinge, right angle flexure hinge and unilateral V-type hinge was designed. Pseudo-rigid-body model was established, and position analysis was conducted on it to obtain positive solution and inverse solution of the platform. Meanwhile, simulation analysis was conducted on the platform with finite elements analysis. Test experiment system of 3-DOF planar nano-positioning platform with 3-PRR structure was established. Experimental result indicates that travel ranges of 3-PRR platform along x-axis, y-axis and maximum rotary angle are respectively -11.32~11.41 μm, -12.47~12.76 μm, 3.63', and corresponding resolution ratios are respectively 71 nm, 83 nm, 1.35″. Maximal errors of theoretical analysis and finite element simulation to experimental result are respectively 5.87%, 6.19% to verify correctness of theoretical analysis and finite element simulation. Displacement output of x-axis and y-axis is approximately proportional to output voltage of strain gauges,which verifies the feasibility to use strain gauges to detect movement of 3-PRR platform.