Abstract
Design and performance testing of a one-dimensional nano-positioning stage with large travel range and high resolution are presented. Driven by dual piezoeletric actuators, the stage is developed based on differential leverage and flexible hinge. Flexible hinge stiffness, input reaction force, and amplification ratio are firstly analyzed based on material mechanics and structural vibration. The finite element analysis is used for validating amplification ratio and admissible stress. Finally, the experimental setup is developed and the performance of the stage is tested. The results show that the stage has a travel range of over 240 μm and a resolution of about 10 nm with the outsize of 80 mm × 60 mm × 20 mm. The proposed stage based on differential leverage can be used for large travel-range nano-positioning with high resolution.
| Original language | English |
|---|---|
| Pages (from-to) | 384-389 |
| Number of pages | 6 |
| Journal | Nanotechnology and Precision Engineering |
| Volume | 10 |
| Issue number | 5 |
| State | Published - Sep 2012 |
Keywords
- Flexible hinge
- High resolution
- Large travel range
- Nano-positioning
- Piezoelectric actuator
Fingerprint
Dive into the research topics of 'Design and testing of one-dimensional nano-positioning stage with large travel range and high resolution'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver