Design and fabrication of plane valveless micropumps

Yu Feng Zhang; Guo Wei Zhang; Xiao Wei Liu; Wei Ping Chen; Xi Lian Wang; Wei Wang; He Nan Ni

Design and fabrication of plane valveless micropumps

Yu Feng Zhang^*
, Guo Wei Zhang
, Xiao Wei Liu
, Wei Ping Chen
, Xi Lian Wang
, Wei Wang
, He Nan Ni

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18 mm × 13 mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 5580 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.

Original language	English
Pages (from-to)	936-939
Number of pages	4
Journal	Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology
Volume	39
Issue number	6
State	Published - Jun 2007

Keywords

Diffuser
MEMS
Nozzle
Valveless micropump

Cite this

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title = "Design and fabrication of plane valveless micropumps",

abstract = "A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18 mm × 13 mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 5580 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.",

keywords = "Diffuser, MEMS, Nozzle, Valveless micropump",

author = "Zhang, \{Yu Feng\} and Zhang, \{Guo Wei\} and Liu, \{Xiao Wei\} and Chen, \{Wei Ping\} and Wang, \{Xi Lian\} and Wei Wang and Ni, \{He Nan\}",

year = "2007",

month = jun,

language = "英语",

volume = "39",

pages = "936--939",

journal = "Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology",

issn = "0367-6234",

publisher = "Harbin Institute of Technology",

number = "6",

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TY - JOUR

T1 - Design and fabrication of plane valveless micropumps

AU - Zhang, Yu Feng

AU - Zhang, Guo Wei

AU - Liu, Xiao Wei

AU - Chen, Wei Ping

AU - Wang, Xi Lian

AU - Wang, Wei

AU - Ni, He Nan

PY - 2007/6

Y1 - 2007/6

N2 - A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18 mm × 13 mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 5580 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.

AB - A valveless micropump with the unilateral rectification characteristic was designed according to the diffuser/nozzle theory. The valveless micropump was fabricated by MEMS technology including anisotropic etching, supplementary angle and anodic bonding, with the size of 18 mm × 13 mm. The tests of the micropump show that max pump pressure and flow rate reach to 14.8 kPa and 5580 μL/min respectively, with the length, breadth and etching depth of diffuser/nozzle of 2.5 mm, 150 μm and 150 μm.

KW - Diffuser

KW - MEMS

KW - Nozzle

KW - Valveless micropump

UR - https://www.scopus.com/pages/publications/34447115590

M3 - 文章

AN - SCOPUS:34447115590

SN - 0367-6234

VL - 39

SP - 936

EP - 939

JO - Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

JF - Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology

IS - 6

ER -

Design and fabrication of plane valveless micropumps

Abstract

Keywords

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