Design and development of MEMS assembly system

Liguo Chen; Lining Sun; Weibin Rong; Hui Xie

Design and development of MEMS assembly system

Liguo Chen^*
, Lining Sun
, Weibin Rong
, Hui Xie

^*Corresponding author for this work

School of Mechatronics Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Based on the analyses of micro-assembly tasks, the function needed for micro-assembly system was discussed. A new micro-assembly system was designed, and the key modules were described in detail. The system was used to complete the micro-alignment and felt of micro spectral analysis chips. Experiments show that the system is useful in micro-assembly of typical MEMS chips.

Original language	English
Pages (from-to)	1226-1228+1232
Journal	Zhongguo Jixie Gongcheng/China Mechanical Engineering
Volume	16
Issue number	14
State	Published - 25 Jul 2005

Keywords

MEMS
Micro-assembly
Micro-vision
Tool

Cite this

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title = "Design and development of MEMS assembly system",

abstract = "Based on the analyses of micro-assembly tasks, the function needed for micro-assembly system was discussed. A new micro-assembly system was designed, and the key modules were described in detail. The system was used to complete the micro-alignment and felt of micro spectral analysis chips. Experiments show that the system is useful in micro-assembly of typical MEMS chips.",

keywords = "MEMS, Micro-assembly, Micro-vision, Tool",

author = "Liguo Chen and Lining Sun and Weibin Rong and Hui Xie",

year = "2005",

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TY - JOUR

T1 - Design and development of MEMS assembly system

AU - Chen, Liguo

AU - Sun, Lining

AU - Rong, Weibin

AU - Xie, Hui

PY - 2005/7/25

Y1 - 2005/7/25

N2 - Based on the analyses of micro-assembly tasks, the function needed for micro-assembly system was discussed. A new micro-assembly system was designed, and the key modules were described in detail. The system was used to complete the micro-alignment and felt of micro spectral analysis chips. Experiments show that the system is useful in micro-assembly of typical MEMS chips.

AB - Based on the analyses of micro-assembly tasks, the function needed for micro-assembly system was discussed. A new micro-assembly system was designed, and the key modules were described in detail. The system was used to complete the micro-alignment and felt of micro spectral analysis chips. Experiments show that the system is useful in micro-assembly of typical MEMS chips.

KW - MEMS

KW - Micro-assembly

KW - Micro-vision

KW - Tool

UR - https://www.scopus.com/pages/publications/23744438781

M3 - 文章

AN - SCOPUS:23744438781

SN - 1004-132X

VL - 16

SP - 1226-1228+1232

JO - Zhongguo Jixie Gongcheng/China Mechanical Engineering

JF - Zhongguo Jixie Gongcheng/China Mechanical Engineering

IS - 14

ER -

Design and development of MEMS assembly system

Abstract

Keywords

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