@inproceedings{ed49effe362e4d5fad12309aa924b21a,
title = "Design and development of measuring device for beam pointing and positional errors in Multi-axes laser interferometric systems",
abstract = "The mechanism of Abbe error and cosine error resulting from beam pointing and positional errors in a laser interference measurement system was analyzed, a PSD-based measurement method was proposed to measure both errors simultaneously. A light intensity adaptive measuring device was designed for measurement of pointing and positional errors. Experimental results indicated that the measuring range and resolution of the position deviation could reach ±4.5mm and 1μm respectively; the angular range and resolution could reach ±0.112rad and 25μrad.",
keywords = "Laser interferometer, PSD, Pointing error, Positional error, Self-adaption",
author = "Pengcheng Hu and Yifei Zhang and Ting Wu and Guibin Yuan",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014 ; Conference date: 08-08-2014 Through 10-08-2014",
year = "2015",
doi = "10.1117/12.2181146",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xianfang Wen and Jiubin Tan",
booktitle = "Ninth International Symposium on Precision Engineering Measurements and Instrumentation",
address = "美国",
}