Design and analysis of a piezo-actuated hydraulic micro-displacement amplifier with high bandwidth and large amplification ratio

Micro-displacement amplifiers show great potential for enhancing the performance of piezoelectric ceramic stacks. However, designing a compact micro-displacement amplifier with a high amplification ratio and broad bandwidth remains challenging. This article introduces a hydraulic micro-displacement amplifier driven by a piezoelectric ceramic stack with a large amplification ratio, high bandwidth, and eliminating parasitic displacement. Theoretical and simulation analyses are performed for the hydraulic micro-displacement amplifier, optimizing parameters such as edge thin ring thickness and spring stiffness. A prototype was fabricated and tested in a series of experiments. The experimental results demonstrate that, under steady-state conditions, the hydraulic micro-displacement amplifier achieves an amplification ratio of 26.12 with a standard deviation of 2.28. The maximum output displacement is 172.4 μm at 150 V, and the resonant frequency is 445 Hz under a 20 N load. This study provides a novel approach to designing micro-displacement amplifiers.