Design and analysis of 2-DOF nanopositioning stage driven by PZT

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	31
Number of pages	1
Journal	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
Volume	24
Issue number	1
State	Published - Feb 2002

Cite this

@article{10f89f25ee034f43b48d456ea82d16da,

title = "Design and analysis of 2-DOF nanopositioning stage driven by PZT",

author = "Liu, \{Pin Kuan\} and Qu, \{Dong Sheng\} and Li Wang and Sun, \{Li Ning\}",

year = "2002",

month = feb,

language = "英语",

volume = "24",

pages = "31",

journal = "Yadian Yu Shengguang/Piezoelectrics and Acoustooptics",

issn = "1004-2474",

publisher = "Sichuan Institute of Piezoelectric and Acoustooptic Technology",

number = "1",

}

TY - JOUR

T1 - Design and analysis of 2-DOF nanopositioning stage driven by PZT

AU - Liu, Pin Kuan

AU - Qu, Dong Sheng

AU - Wang, Li

AU - Sun, Li Ning

PY - 2002/2

Y1 - 2002/2

UR - https://www.scopus.com/pages/publications/0036486353

M3 - 文章

AN - SCOPUS:0036486353

SN - 1004-2474

VL - 24

SP - 31

JO - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

JF - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

IS - 1

ER -