Description of surface roughness of sol-gel films/coatings by X-ray reflectivity technique

Lili Yang; Dengteng Ge; Hua Wei; Huijie Zhao; Fei He; Xiaodong He

doi:10.1016/j.apsusc.2009.05.045

Description of surface roughness of sol-gel films/coatings by X-ray reflectivity technique

Lili Yang
, Dengteng Ge
, Hua Wei
, Huijie Zhao
, Fei He
, Xiaodong He^*

^*Corresponding author for this work

School of Astronautics, Harbin Institute of Technology
Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

As an excellent optical or photoelectric material, indium tin oxide (ITO) film was prepared by sol-gel dip-coating and subsequent annealing process. X-ray reflectivity measurement based on the first Born approximation theory was performed for the characterization of surface roughness of ITO film. It is found that the roughness can be described as self-affined over finite length scales and the surface roughness increases with the annealing temperature or holding time. The results were compared with complementary data obtained by atomic force microscope tests and it is found that they match very well. The first Born approximation theory provides a valuable tool for the rough surface characterization of sol-gel films/coating through X-ray reflectivity technique.

Original language	English
Pages (from-to)	8226-8229
Number of pages	4
Journal	Applied Surface Science
Volume	255
Issue number	19
DOIs	https://doi.org/10.1016/j.apsusc.2009.05.045
State	Published - 15 Jul 2009
Externally published	Yes

Keywords

First Born approximation
Sol-gel film
Surface roughness
X-ray reflectivity

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10.1016/j.apsusc.2009.05.045

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title = "Description of surface roughness of sol-gel films/coatings by X-ray reflectivity technique",

abstract = "As an excellent optical or photoelectric material, indium tin oxide (ITO) film was prepared by sol-gel dip-coating and subsequent annealing process. X-ray reflectivity measurement based on the first Born approximation theory was performed for the characterization of surface roughness of ITO film. It is found that the roughness can be described as self-affined over finite length scales and the surface roughness increases with the annealing temperature or holding time. The results were compared with complementary data obtained by atomic force microscope tests and it is found that they match very well. The first Born approximation theory provides a valuable tool for the rough surface characterization of sol-gel films/coating through X-ray reflectivity technique.",

keywords = "First Born approximation, Sol-gel film, Surface roughness, X-ray reflectivity",

author = "Lili Yang and Dengteng Ge and Hua Wei and Huijie Zhao and Fei He and Xiaodong He",

year = "2009",

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day = "15",

doi = "10.1016/j.apsusc.2009.05.045",

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T1 - Description of surface roughness of sol-gel films/coatings by X-ray reflectivity technique

AU - Yang, Lili

AU - Ge, Dengteng

AU - Wei, Hua

AU - Zhao, Huijie

AU - He, Fei

AU - He, Xiaodong

PY - 2009/7/15

Y1 - 2009/7/15

N2 - As an excellent optical or photoelectric material, indium tin oxide (ITO) film was prepared by sol-gel dip-coating and subsequent annealing process. X-ray reflectivity measurement based on the first Born approximation theory was performed for the characterization of surface roughness of ITO film. It is found that the roughness can be described as self-affined over finite length scales and the surface roughness increases with the annealing temperature or holding time. The results were compared with complementary data obtained by atomic force microscope tests and it is found that they match very well. The first Born approximation theory provides a valuable tool for the rough surface characterization of sol-gel films/coating through X-ray reflectivity technique.

AB - As an excellent optical or photoelectric material, indium tin oxide (ITO) film was prepared by sol-gel dip-coating and subsequent annealing process. X-ray reflectivity measurement based on the first Born approximation theory was performed for the characterization of surface roughness of ITO film. It is found that the roughness can be described as self-affined over finite length scales and the surface roughness increases with the annealing temperature or holding time. The results were compared with complementary data obtained by atomic force microscope tests and it is found that they match very well. The first Born approximation theory provides a valuable tool for the rough surface characterization of sol-gel films/coating through X-ray reflectivity technique.

KW - First Born approximation

KW - Sol-gel film

KW - Surface roughness

KW - X-ray reflectivity

UR - https://www.scopus.com/pages/publications/67649425648

U2 - 10.1016/j.apsusc.2009.05.045

DO - 10.1016/j.apsusc.2009.05.045

M3 - 文章

AN - SCOPUS:67649425648

SN - 0169-4332

VL - 255

SP - 8226

EP - 8229

JO - Applied Surface Science

JF - Applied Surface Science

IS - 19

ER -

Description of surface roughness of sol-gel films/coatings by X-ray reflectivity technique

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Keywords

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