Deposition of TiN layer on TiNi thin films to improve surface properties

Yongqing Fu; Hejun Du; Sam Zhang

doi:10.1016/S0257-8972(02)00898-8

Deposition of TiN layer on TiNi thin films to improve surface properties

Yongqing Fu^*
, Hejun Du
, Sam Zhang

^*Corresponding author for this work

Nanyang Technological University
Singapore-MIT Alliance

Research output: Contribution to journal › Article › peer-review

51 Scopus citations

Abstract

TiNi based shape memory alloy (SMA) thin films have been widely used in biomedical and microelectromechanical systems. However, there are still some concerns for their wide applications because of their unsatisfactory mechanical and tribological performances, chemical resistance and biological reliability. This paper explored the deposition and effects of TiN protective layer on TiNi thin films to improve their surface properties while retaining the shape memory effects. Results indicated that the presence of an adherent and hard TiN layer (300 nm) on TiNi based SMA film (3.5 μm) formed a passivation layer, improved hardness and tribological properties, without sacrificing the phase transformation and shape memory effect of the TiNi film.

Original language	English
Pages (from-to)	129-136
Number of pages	8
Journal	Surface and Coatings Technology
Volume	167
Issue number	2-3
DOIs	https://doi.org/10.1016/S0257-8972(02)00898-8
State	Published - 22 Apr 2003
Externally published	Yes

Keywords

Shape memory
Sputtering
Thin films
TiN
TiNi

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10.1016/S0257-8972(02)00898-8

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title = "Deposition of TiN layer on TiNi thin films to improve surface properties",

abstract = "TiNi based shape memory alloy (SMA) thin films have been widely used in biomedical and microelectromechanical systems. However, there are still some concerns for their wide applications because of their unsatisfactory mechanical and tribological performances, chemical resistance and biological reliability. This paper explored the deposition and effects of TiN protective layer on TiNi thin films to improve their surface properties while retaining the shape memory effects. Results indicated that the presence of an adherent and hard TiN layer (300 nm) on TiNi based SMA film (3.5 μm) formed a passivation layer, improved hardness and tribological properties, without sacrificing the phase transformation and shape memory effect of the TiNi film.",

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T1 - Deposition of TiN layer on TiNi thin films to improve surface properties

AU - Fu, Yongqing

AU - Du, Hejun

AU - Zhang, Sam

PY - 2003/4/22

Y1 - 2003/4/22

N2 - TiNi based shape memory alloy (SMA) thin films have been widely used in biomedical and microelectromechanical systems. However, there are still some concerns for their wide applications because of their unsatisfactory mechanical and tribological performances, chemical resistance and biological reliability. This paper explored the deposition and effects of TiN protective layer on TiNi thin films to improve their surface properties while retaining the shape memory effects. Results indicated that the presence of an adherent and hard TiN layer (300 nm) on TiNi based SMA film (3.5 μm) formed a passivation layer, improved hardness and tribological properties, without sacrificing the phase transformation and shape memory effect of the TiNi film.

AB - TiNi based shape memory alloy (SMA) thin films have been widely used in biomedical and microelectromechanical systems. However, there are still some concerns for their wide applications because of their unsatisfactory mechanical and tribological performances, chemical resistance and biological reliability. This paper explored the deposition and effects of TiN protective layer on TiNi thin films to improve their surface properties while retaining the shape memory effects. Results indicated that the presence of an adherent and hard TiN layer (300 nm) on TiNi based SMA film (3.5 μm) formed a passivation layer, improved hardness and tribological properties, without sacrificing the phase transformation and shape memory effect of the TiNi film.

KW - Shape memory

KW - Sputtering

KW - Thin films

KW - TiN

KW - TiNi

UR - https://www.scopus.com/pages/publications/0037461153

U2 - 10.1016/S0257-8972(02)00898-8

DO - 10.1016/S0257-8972(02)00898-8

M3 - 文章

AN - SCOPUS:0037461153

SN - 0257-8972

VL - 167

SP - 129

EP - 136

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 2-3

ER -

Deposition of TiN layer on TiNi thin films to improve surface properties

Abstract

Keywords

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