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Demonstration of β-Ga2O3 Lateral Heterojunction Diodes with 450 V Single-event Burnout Voltage

  • Song He
  • , Jinyang Liu
  • , Guangwei Xu*
  • , Ziyuan Wang
  • , Weibing Hao
  • , Da Yu
  • , Tianqi Wang
  • , Jie Luo
  • , Jie Liu
  • , Xuanze Zhou
  • , Shu Yang
  • , Shibing Long
  • *Corresponding author for this work
  • University of Science and Technology of China
  • CAS - Institute of Modern Physics

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This work investigates the single-event effects (SEE) tolerance of lateral β-Ga2O3/NiO heterojunction diodes (HJDs). Under tantalum-ion irradiation with linear energy transfer (LET) of 82.1 MeV•cm2/mg, the lateral HJDs exhibit markedly superior SEE robustness than vertical devices. The ratio of single-event burnout voltage (VSEB) to static breakdown voltage reaches approximately 0.4, substantially surpassing our previously reported vertical HJDs. Meanwhile, the specific ON-resistance of lateral HJDs with an anode-to-cathode length (LAC) of 10 and 20 μm is calculated to be 13.0 and 36.8 mΩ•cm2 respectively, which is comparable to that of vertical diodes. Moreover, the lateral HJDs with LAC of 20 μm present excellent reliability exposed to heavy-ion irradiation under a reverse bias of 450 V attributed to elongated junction termination extension (JTE) mitigating the surface electric field. This work demonstrates the potential of β-Ga2O3 lateral diodes for future radiation-hardened applications.

Original languageEnglish
Title of host publication2026 IEEE 38th International Symposium on Power Semiconductor Devices and ICs, ISPSD 2026
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages277-280
Number of pages4
ISBN (Electronic)9798331577834
DOIs
StatePublished - 2026
Event38th IEEE International Symposium on Power Semiconductor Devices and ICs, ISPSD 2026 - Las Vegas, United States
Duration: 24 May 202628 May 2026

Publication series

NameProceedings of the International Symposium on Power Semiconductor Devices and ICs
ISSN (Print)1063-6854

Conference

Conference38th IEEE International Symposium on Power Semiconductor Devices and ICs, ISPSD 2026
Country/TerritoryUnited States
CityLas Vegas
Period24/05/2628/05/26

Keywords

  • irradiation
  • lateral HJDs
  • p-NiO
  • single-event burnout
  • single-event effects
  • β-GaO

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