@inproceedings{95844fef4de7423890785af95f0d1a6a,
title = "Delay error and compensation in measurement of micro-scale using aiming and triggering method",
abstract = "In order to improve accuracy of critical contacting position in measurement of micro-scale using aiming and triggering method, delay error of triggering signal, sampling delay error of sensor and length measuring device(double frequency laser interferometer) impact on accuracy are analyzed, compensation methods of solving nodal equation through establishing piecewise fitting function based on least square polynomial fitting and compute threshold triggering points through computing delay time are put forward. With this method, the measured diameter of micro-hole with nominal diameter Φ 0.3mm and depth 1.0mm is compensated. Results indicate that diameter of micro-hole after compensation increases 0.12 μm, closer to nominal value, and experimental standard deviation reduces by 0.069 μm. Therefore the measuring repeatability is improved, which demonstrates that the method is correct and effective.",
keywords = "aiming and triggering, delay error, least squares polynomial fitting, micro-scale",
author = "Cui, \{Ji Wen\} and Yang, \{Fu Ling\} and Tan, \{Jiu Bin\}",
year = "2013",
doi = "10.1117/12.2014509",
language = "英语",
isbn = "9780819495501",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Eighth International Symposium on Precision Engineering Measurements and Instrumentation",
note = "8th International Symposium on Precision Engineering Measurements and Instrumentation ; Conference date: 08-08-2012 Through 11-08-2012",
}