Data-Based Dynamic Decoupling Control for MIMO Precision Motion Stages with Motor Dynamic Compensation

Decoupling control is the most used strategy for multiple degree motion stages in industrial, such as the lithography and the wafer test equipment. A static decoupling matrix is commonly used to realize the independent motion control for each degree of freedom of the motion stage. Nevertheless, the interactions emerge due to inaccurate mechanical parameters which will lead to a coarse decoupling matrix. Simultaneously, the differences in motor dynamics compounds the challenge, leading to a diminished precision in decoupling. In this paper, to enhance the motion performance of the wafer stage, the effect of errors in mechanical parameters and differences in the dynamic characteristics of actuators are analyzed first. Subsequently, a data-driven dynamic decoupling method is developed to improve the precision of decoupling. The effectiveness and practicality of the proposed method are demonstrated through numerical simulations.