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Current ways and means for reduction or elimination of periodic nonlinearity in heterodyne interferometer

  • Peng Chen
  • , Peng Cheng Hu*
  • , Xue Mei Ding
  • , Jiu Bin Tan
  • *Corresponding author for this work
  • Center of Ultra-precision Optoelectronic Instrument Engeering

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reviews ways and means used for reduction or elimination of periodic nonlinearity in heterodyne interferometers. The periodic nonlinearity resulting from polarization mixing or frequency mixing in heterodyne interferometers was modeled into one expression, which included the initial polarization state of the laser source, the rotational alignment of the beam splitter along with different transmission coefficients for polarization states and the rotational misalignment of a receiving polarizer. Three compensation techniques, measuring two orthogonal output signals, Lissajous Compensation and Chu-Ray Algorithm, are described and discussed for reduction of periodic nonlinearity. These algorithms needed at least one fringe of motion or a constant velocity sweep to properly correct the motion. And five types of two spatially separated beam interferometer configurations are described and discussed for elimination of periodic nonlinearity to a picometer level. It is concluded that the main disadvantage of these configurations was their complex architecture with unbalanced long beam paths.

Original languageEnglish
Title of host publicationNinth International Symposium on Precision Engineering Measurements and Instrumentation
EditorsXianfang Wen, Jiubin Tan
PublisherSPIE
ISBN (Electronic)9781628415612
DOIs
StatePublished - 2015
Externally publishedYes
Event9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014 - Changsha, China
Duration: 8 Aug 201410 Aug 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9446
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014
Country/TerritoryChina
CityChangsha
Period8/08/1410/08/14

Keywords

  • Compensation techniques
  • Heterodyne interferometer
  • Periodic nonlinearity
  • Spatially separated beam interferometer

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