@inproceedings{8ce71933ff704831b1aeacbefce36f51,
title = "Current ways and means for reduction or elimination of periodic nonlinearity in heterodyne interferometer",
abstract = "This paper reviews ways and means used for reduction or elimination of periodic nonlinearity in heterodyne interferometers. The periodic nonlinearity resulting from polarization mixing or frequency mixing in heterodyne interferometers was modeled into one expression, which included the initial polarization state of the laser source, the rotational alignment of the beam splitter along with different transmission coefficients for polarization states and the rotational misalignment of a receiving polarizer. Three compensation techniques, measuring two orthogonal output signals, Lissajous Compensation and Chu-Ray Algorithm, are described and discussed for reduction of periodic nonlinearity. These algorithms needed at least one fringe of motion or a constant velocity sweep to properly correct the motion. And five types of two spatially separated beam interferometer configurations are described and discussed for elimination of periodic nonlinearity to a picometer level. It is concluded that the main disadvantage of these configurations was their complex architecture with unbalanced long beam paths.",
keywords = "Compensation techniques, Heterodyne interferometer, Periodic nonlinearity, Spatially separated beam interferometer",
author = "Peng Chen and Hu, \{Peng Cheng\} and Ding, \{Xue Mei\} and Tan, \{Jiu Bin\}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014 ; Conference date: 08-08-2014 Through 10-08-2014",
year = "2015",
doi = "10.1117/12.2181172",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xianfang Wen and Jiubin Tan",
booktitle = "Ninth International Symposium on Precision Engineering Measurements and Instrumentation",
address = "美国",
}