Current development of trans-scale precision positioning technology based on the stick-slip effect

The trans-scale precision positioning technology has been already owned broad prospects in many engineering fields such as the nano-manipulation, large-scale IC fabrication and the bio-technics etc.. The operating principles of 4 types of trans-scale precision positioning technologies of the macro-micro hybrid driving, piezoelectric ultrasonic motor driving, inchworm-type driving and slip-stick driving have been summarized in this paper and the resolution, speed, force, size, actuator numbers and structure of these 4 types of driving methods have also been compared and analyzed. The results showed that the slip-stick driving method had the advantages of the large scope movement, high resolution, simple structure, small size and high integration, thus was very suitable for the micro and nano-manipulation applications. The driving principle, key technology research and prototype experiment study of the stick-slip driving method at home and abroad were analyzed. The problems of the stick-slip driving existed in the current studies and the key technology to be resolved have also been proposed in this paper.