@inproceedings{bac8069e934444efb2d91952058707db,
title = "Cooperation Method of Symmetrically Distributed Multi-Nanorobotic Manipulators Inside SEM for Nanodevice Constructing",
abstract = "This paper presented a series of cooperation strategies of symmetrically distributed multi-nanorobotic manipulators according to different tasks during nanodevice fabrication inside scanning electron microscopy (SEM). For constructing carbon nanotube (CNT) based nanodevice such as carbon nanotube field effect transistor (CNTFET), the mainly assembly processes implemented by different nanorobotic manipulators were discussed. Manipulation strategies for each task during assembly were established based on nanorobotic manipulation system. Experiments were designed and carried out to evaluate the effectiveness of different manipulation strategies designed for multi-Task. The results shown that the designed manipulation strategies was adapted for the nanorobotic manipulation system during CNT based nanodevice assembly.",
keywords = "Nanomanipulation, SEM, multi-manipulator cooperation, nanodevice assemly",
author = "Mingyu Wang and Yaqiong Wang and Zhan Yang and Tao Chen and Lining Sun and Toshio Fukuda",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018 ; Conference date: 22-04-2018 Through 26-04-2018",
year = "2018",
month = dec,
day = "3",
doi = "10.1109/NEMS.2018.8556984",
language = "英语",
series = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "543--548",
booktitle = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
address = "美国",
}