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Cooperation Method of Symmetrically Distributed Multi-Nanorobotic Manipulators Inside SEM for Nanodevice Constructing

  • Mingyu Wang
  • , Yaqiong Wang
  • , Zhan Yang*
  • , Tao Chen
  • , Lining Sun
  • , Toshio Fukuda
  • *Corresponding author for this work
  • Soochow University
  • Nagoya University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presented a series of cooperation strategies of symmetrically distributed multi-nanorobotic manipulators according to different tasks during nanodevice fabrication inside scanning electron microscopy (SEM). For constructing carbon nanotube (CNT) based nanodevice such as carbon nanotube field effect transistor (CNTFET), the mainly assembly processes implemented by different nanorobotic manipulators were discussed. Manipulation strategies for each task during assembly were established based on nanorobotic manipulation system. Experiments were designed and carried out to evaluate the effectiveness of different manipulation strategies designed for multi-Task. The results shown that the designed manipulation strategies was adapted for the nanorobotic manipulation system during CNT based nanodevice assembly.

Original languageEnglish
Title of host publicationNEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages543-548
Number of pages6
ISBN (Electronic)9781538652732
DOIs
StatePublished - 3 Dec 2018
Externally publishedYes
Event13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018 - Singapore, Singapore
Duration: 22 Apr 201826 Apr 2018

Publication series

NameNEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018
Country/TerritorySingapore
CitySingapore
Period22/04/1826/04/18

Keywords

  • Nanomanipulation
  • SEM
  • multi-manipulator cooperation
  • nanodevice assemly

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