Control of an ultrasonic transducer to realize low speed driven

This paper deals with the control of a transducer to realize low speed. A new PWM control is proposed to fit the transducer. By this control method, the transducer is directly excited by pulses whose width can be modulated. The noise induced by conventional PWM control is eliminated and the motor works more steadily and more quietly. Instead of the general method of decreasing vibrating amplitude of ultrasonic motor to realize low speed, in this paper, two fast contrary elliptical vibrations of the transducer's two Langevin vibrators are excited to restrain skip-slip influence on ultrasonic motor's low speed performance and the driven is realized by the difference of the two vibrators' vibrating amplitudes. Experiments had been carried out by driving an aerostatic guide and fuzzy control is applied. The controlled speed reached 0.1 mm/s.