Computer simulation and CAD of MEMS and microsystems

Weiping Chen; Rongyan Chuai; Li Tian; Dan Zhang; Xiaowei Liu

Computer simulation and CAD of MEMS and microsystems

Weiping Chen^*
, Rongyan Chuai
, Li Tian
, Dan Zhang
, Xiaowei Liu

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology
Shenyang University of Technology
Heilongjiang University

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Characteristics of MEMS CAD and design methods of MEMS and microsystem were introduced. The performances of simulators in MEMS CAD, such as system level, device behavioral level, device physical level and process level simulator, were analyzed, and relations and applications for MEMS CAD were researched. Methods of MEMS CAD and EDA tools for MEMS and microsystem were summarized.

Original language	English
Pages (from-to)	299-301
Number of pages	3
Journal	Zhongguo Jixie Gongcheng/China Mechanical Engineering
Volume	16
Issue number	SUPPL.
State	Published - Jul 2005

Keywords

CAD
MEMS
Microsystem
Simulation
Simulator

Cite this

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title = "Computer simulation and CAD of MEMS and microsystems",

abstract = "Characteristics of MEMS CAD and design methods of MEMS and microsystem were introduced. The performances of simulators in MEMS CAD, such as system level, device behavioral level, device physical level and process level simulator, were analyzed, and relations and applications for MEMS CAD were researched. Methods of MEMS CAD and EDA tools for MEMS and microsystem were summarized.",

keywords = "CAD, MEMS, Microsystem, Simulation, Simulator",

author = "Weiping Chen and Rongyan Chuai and Li Tian and Dan Zhang and Xiaowei Liu",

year = "2005",

month = jul,

language = "英语",

volume = "16",

pages = "299--301",

journal = "Zhongguo Jixie Gongcheng/China Mechanical Engineering",

issn = "1004-132X",

publisher = "Chinese Mechanical Engineering Society",

number = "SUPPL.",

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TY - JOUR

T1 - Computer simulation and CAD of MEMS and microsystems

AU - Chen, Weiping

AU - Chuai, Rongyan

AU - Tian, Li

AU - Zhang, Dan

AU - Liu, Xiaowei

PY - 2005/7

Y1 - 2005/7

N2 - Characteristics of MEMS CAD and design methods of MEMS and microsystem were introduced. The performances of simulators in MEMS CAD, such as system level, device behavioral level, device physical level and process level simulator, were analyzed, and relations and applications for MEMS CAD were researched. Methods of MEMS CAD and EDA tools for MEMS and microsystem were summarized.

AB - Characteristics of MEMS CAD and design methods of MEMS and microsystem were introduced. The performances of simulators in MEMS CAD, such as system level, device behavioral level, device physical level and process level simulator, were analyzed, and relations and applications for MEMS CAD were researched. Methods of MEMS CAD and EDA tools for MEMS and microsystem were summarized.

KW - CAD

KW - MEMS

KW - Microsystem

KW - Simulation

KW - Simulator

UR - https://www.scopus.com/pages/publications/23744491686

M3 - 文章

AN - SCOPUS:23744491686

SN - 1004-132X

VL - 16

SP - 299

EP - 301

JO - Zhongguo Jixie Gongcheng/China Mechanical Engineering

JF - Zhongguo Jixie Gongcheng/China Mechanical Engineering

IS - SUPPL.

ER -

Computer simulation and CAD of MEMS and microsystems

Abstract

Keywords

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