Comparison of PECVD Temperature Control Methods

Yajie Huang; Donglai Zhang; Bin Zhang; Anshou Li

doi:10.1109/IC2ECS57645.2022.10088105

Comparison of PECVD Temperature Control Methods

Yajie Huang
, Donglai Zhang^*
, Bin Zhang
, Anshou Li

^*Corresponding author for this work

Harbin Institute of Technology Shenzhen
Ltd.
Peng Cheng Laboratory

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Various coating devices of temperature field of plasma-enhanced chemical vapor deposition (PECVD) can be employed during operation. The heating resistance, which is used to heat the temperature field inside the device, is applied in various powers from temperature increases that the temperature field further produces. Temperature management is essential because the temperature range directly affects the coating quality. This research derives the temperature increase relation of the regional center point through the finite element simulation analysis of the thermal field. The parameter identification method is used to identify the model of the controlled item. With multiple control methods compared, the simulation results show that the Dahlin control method performs better in adjustment time and stability than others, which has more practical application value in temperature control.

Original language	English
Title of host publication	2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	165-169
Number of pages	5
ISBN (Electronic)	9798350399165
DOIs	https://doi.org/10.1109/IC2ECS57645.2022.10088105
State	Published - 2022
Externally published	Yes
Event	2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022 - Virtual, Online, China Duration: 16 Dec 2022 → 18 Dec 2022

Publication series

Name	2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022

Conference

Conference	2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022
Country/Territory	China
City	Virtual, Online
Period	16/12/22 → 18/12/22

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

simulation analysis
temperature control
temperature field

Access to Document

10.1109/IC2ECS57645.2022.10088105

Cite this

Huang, Y., Zhang, D., Zhang, B., & Li, A. (2022). Comparison of PECVD Temperature Control Methods. In 2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022 (pp. 165-169). (2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IC2ECS57645.2022.10088105

@inproceedings{63053ebfb251484185eb46ece84463a8,

title = "Comparison of PECVD Temperature Control Methods",

abstract = "Various coating devices of temperature field of plasma-enhanced chemical vapor deposition (PECVD) can be employed during operation. The heating resistance, which is used to heat the temperature field inside the device, is applied in various powers from temperature increases that the temperature field further produces. Temperature management is essential because the temperature range directly affects the coating quality. This research derives the temperature increase relation of the regional center point through the finite element simulation analysis of the thermal field. The parameter identification method is used to identify the model of the controlled item. With multiple control methods compared, the simulation results show that the Dahlin control method performs better in adjustment time and stability than others, which has more practical application value in temperature control.",

keywords = "simulation analysis, temperature control, temperature field",

author = "Yajie Huang and Donglai Zhang and Bin Zhang and Anshou Li",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022 ; Conference date: 16-12-2022 Through 18-12-2022",

year = "2022",

doi = "10.1109/IC2ECS57645.2022.10088105",

language = "英语",

series = "2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "165--169",

booktitle = "2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022",

address = "美国",

}

Huang, Y, Zhang, D, Zhang, B & Li, A 2022, Comparison of PECVD Temperature Control Methods. in 2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022. 2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022, Institute of Electrical and Electronics Engineers Inc., pp. 165-169, 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022, Virtual, Online, China, 16/12/22. https://doi.org/10.1109/IC2ECS57645.2022.10088105

Comparison of PECVD Temperature Control Methods. / Huang, Yajie; Zhang, Donglai; Zhang, Bin et al.
2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 165-169 (2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Comparison of PECVD Temperature Control Methods

AU - Huang, Yajie

AU - Zhang, Donglai

AU - Zhang, Bin

AU - Li, Anshou

PY - 2022

Y1 - 2022

N2 - Various coating devices of temperature field of plasma-enhanced chemical vapor deposition (PECVD) can be employed during operation. The heating resistance, which is used to heat the temperature field inside the device, is applied in various powers from temperature increases that the temperature field further produces. Temperature management is essential because the temperature range directly affects the coating quality. This research derives the temperature increase relation of the regional center point through the finite element simulation analysis of the thermal field. The parameter identification method is used to identify the model of the controlled item. With multiple control methods compared, the simulation results show that the Dahlin control method performs better in adjustment time and stability than others, which has more practical application value in temperature control.

AB - Various coating devices of temperature field of plasma-enhanced chemical vapor deposition (PECVD) can be employed during operation. The heating resistance, which is used to heat the temperature field inside the device, is applied in various powers from temperature increases that the temperature field further produces. Temperature management is essential because the temperature range directly affects the coating quality. This research derives the temperature increase relation of the regional center point through the finite element simulation analysis of the thermal field. The parameter identification method is used to identify the model of the controlled item. With multiple control methods compared, the simulation results show that the Dahlin control method performs better in adjustment time and stability than others, which has more practical application value in temperature control.

KW - simulation analysis

KW - temperature control

KW - temperature field

UR - https://www.scopus.com/pages/publications/85153563471

U2 - 10.1109/IC2ECS57645.2022.10088105

DO - 10.1109/IC2ECS57645.2022.10088105

M3 - 会议稿件

AN - SCOPUS:85153563471

T3 - 2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022

SP - 165

EP - 169

BT - 2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022

Y2 - 16 December 2022 through 18 December 2022

ER -

Huang Y, Zhang D, Zhang B, Li A. Comparison of PECVD Temperature Control Methods. In 2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 165-169. (2022 2nd International Conference on Electrical Engineering and Control Science, IC2ECS 2022). doi: 10.1109/IC2ECS57645.2022.10088105

Comparison of PECVD Temperature Control Methods

Abstract

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UN SDGs

Keywords

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