Abstract
The shape and size of atomic force microscope (AFM) seriously affect the measurement result of nano-scale linewidth. A least square fitting model applicable to AFM measurement technology is established. A sample with 1000 nm nominal linewidth is measured using three kinds of different probe installed in a AFM of model NanoScope IIIa. Linewidth is calculated according to the established model and algorithm. The effect that shape and size of probe acted on measurement result is revealed, as well as the dependence of the model on the size of probe is analyzed too.
| Original language | English |
|---|---|
| Pages (from-to) | 1514-1519 |
| Number of pages | 6 |
| Journal | Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology |
| Volume | 36 |
| Issue number | 11 |
| State | Published - Nov 2004 |
Keywords
- Atomic force microscope
- Least square fitting
- Linewidth
- Probe
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