Abstract
The Ni-Cr/Pt thin film resistors (TFRs) deposited on silicon and GaAs substrates using the RF cluster sputtering system are comparatively analyzed in electrical and physical properties for integrated passive device (IPD) technology. In order to find the suitability of these substrates, the electrical and morphology characterizations for pure and thermally annealed samples have been demonstrated. The pure and the annealed samples on GaAs substrate have shown very less variation of resistivity from room temperature to 200°C. But the variation of resistivity on silicon substrate has changed much for different annealed temperatures. This is due to the mobility variation and the inter-diffusion of silicon with the other metals. This study presents that the resistive Ni-Cr/Pt layers on the GaAs substrate shows more stability, less inter-diffusion and less formation of voids compared to the resistive layers on silicon substrate.
| Original language | English |
|---|---|
| Pages (from-to) | 304-306 |
| Number of pages | 3 |
| Journal | Indian Journal of Engineering and Materials Sciences |
| Volume | 19 |
| Issue number | 5 |
| State | Published - Oct 2012 |
| Externally published | Yes |
Keywords
- Integrated passive device
- RF cluster sputtering system
- Thin film resistor
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