Collisional electron spectroscopy method for gas analysis

Recently developed collisional electron spectroscopy (CES) method, based on identification of gas impurities by registration of groups of nonlocal fast electrons released by Penning ionization of the impurity particles by helium metastable atoms, is verified experimentally. Detection and identification of atoms and molecules of gas impurities in helium at pressures of 14 - 90 Torr with small admixtures of Ar, Kr, CO2, and N2 are carried out. The nonlocal negative glow plasma of short dc microdischarge is used as most suitable medium. Records of the energy spectra of penning electrons are performed by means of an additional electrode - sensor, located at the boundary of the discharge volume. Maxima appear in the electron energy spectra at the characteristic energies corresponding to Penning ionization of the impurity particles by helium metastable atoms.