@inproceedings{e34c795bc22d41ab9b603ccd8541b263,
title = "CMOS compatible, high efficiency subwavelength grating couplers for silicon integrated photonics",
abstract = "We demonstrate a through etched subwavelength grating coupler, which can be patterned together with other photonic components. It achieves a very high coupling efficiency of 59\%with a 3dB bandwidth of 60 nm.",
author = "Xiaochuan Xu and Harish Subbaraman and John Covey and David Kwong and Amir Hosseini and Chen, \{Ray T.\}",
year = "2012",
doi = "10.1364/fio.2012.ftu2a.2",
language = "英语",
isbn = "9781557529565",
series = "Frontiers in Optics, FIO 2012",
publisher = "Optical Society of America (OSA)",
booktitle = "Frontiers in Optics, FIO 2012",
note = "Frontiers in Optics, FIO 2012 ; Conference date: 14-10-2012 Through 18-10-2012",
}