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Chemical etching of glass substrates

  • Nguyen Van Toan
  • , Masaya Toda
  • , Gaopeng Xue
  • , Jakrit Gobpant
  • , Aparporn Sakulkalavek
  • , Nuur Syahidah Sabran
  • , Jun Hieng Kiat
  • , Khairul Fadzli Samat
  • , Takahito Ono
  • Tohoku University
  • Harbin Institute of Technology Shenzhen
  • King Mongkut's Institute of Technology Ladkrabang
  • Universiti Tunku Abdul Rahman
  • Universiti Teknikal Malaysia Melaka

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Abstract

MEMS and microfluidics represent the forefront of technological innovation, spearheading a transformative era in precision control over fluids and mechanical components at scales that were once unimaginable. These groundbreaking technologies have transcended conventional boundaries and are now at the heart of numerous applications [1-3], spanning a wide spectrum of industries. From pioneering advancements in advanced medical diagnostics, where the manipulation of minute biological samples is essential, to the intricate networks that facilitate seamless telecommunications [4, 5], MEMS and microfluidics have become indispensable tools, exemplifying unparalleled efficiency, versatility, and cost-effectiveness. The ability to navigate and manipulate the microscopic and nanoscopic realms with precision opens new frontiers, promising advancements that not only redefine our technological landscape but also significantly impact the way we approach challenges across diverse sectors.

Original languageEnglish
Title of host publicationMicro-Fluidic and Micro-electromechanical System Applications
Subtitle of host publicationSubtractive Processing of Glass Substrates
PublisherCRC Press
Pages71-95
Number of pages25
ISBN (Electronic)9781040833513
ISBN (Print)9781032747798
DOIs
StatePublished - 1 Jan 2026
Externally publishedYes

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