Abstract
Microring resonators on silicon-on-sapphire (SOS) were characterized at 2.75 μm wavelength. We obtained a Q factor of 11400 ± 800. The thermo-optic coefficient of epitaxial silicon of SOS wafer was measured to be 2.11 ± 0.08 × 10 -4 K -1. We also describe a characterization technique to measure the Q of microring resonators using a fixed wavelength source. By only varying the temperature of the device, it is possible to measure the Q of a mid-infrared (mid-IR) microresonator. The proposed method provides an alternative method of Q measurement for microring resonators in mid-IR, where tunable lasers may not be easily available. The technique was used to determine the Q of SOS microring resonators at 2.75 μm wavelength.
| Original language | English |
|---|---|
| Article number | 6217267 |
| Pages (from-to) | 1095-1102 |
| Number of pages | 8 |
| Journal | IEEE Photonics Journal |
| Volume | 4 |
| Issue number | 4 |
| DOIs | |
| State | Published - 2012 |
| Externally published | Yes |
Keywords
- Integrated nanophotonic systems
- mid-infrared (mid-IR)
- silicon nanophotonics
- silicon-on-sapphire (SOS)
- temperature
- waveguide devices
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