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Characterization of metal nanoparticles fabricated in ordered array pores of anodic porous alumina by electron-beam-induced selective deposition

  • Guoqiang Xie*
  • , Minghui Song
  • , Kazutaka Mitsuishi
  • , Kazuo Furuya
  • *Corresponding author for this work
  • National Institute for Materials Science Tsukuba

Research output: Contribution to journalArticlepeer-review

Abstract

The ordered arrays of Au nanoparticles were fabricated by electron-beam-induced selective deposition process in an ordered pore arrays of anodic porous alumina membrane. The microstructure of the as-deposited nanoparticles was characterized using high-resolution transmission electron microscopy (HRTEM), energy dispersive X-ray spectroscopy (EDS) and microdiffraction technique. It was determined that the as-deposited nanoparticles consisted of many nanocrystallites of Au metal. The size of these nanocrystallites in the as-deposited nanoparticles was smaller than 5 nm.

Original languageEnglish
Pages (from-to)91-95
Number of pages5
JournalApplied Surface Science
Volume241
Issue number1-2 SPEC. ISS.
DOIs
StatePublished - 28 Feb 2005
Externally publishedYes

Keywords

  • Anodic porous alumina
  • Electron-beam-induced deposition
  • HRTEM
  • Microdiffraction
  • Nanoparticle

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