Characterization of DLC films prepared by plasma-based ion implantation on AISI 321 steel

Yujiang Wang; Xinxin Ma; Guangze Tang; Mingren Sun

doi:10.1016/j.vacuum.2011.10.015

Characterization of DLC films prepared by plasma-based ion implantation on AISI 321 steel

Yujiang Wang
, Xinxin Ma^*
, Guangze Tang
, Mingren Sun

^*Corresponding author for this work

School of Materials Science and Engineering

Academy of Armored Force Engineering China
Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

DLC films were prepared by plasma-based ion implantation (PBII) using acetylene as carbon source on AISI 321 steel substrate. The effect of implanting voltage on the characteristics of these films was investigated. The structures of the films were analyzed by Raman spectroscopy. The morphologies of the films were observed by atomic force microcopy (AFM), and the hardness of the films was measured with mechanical property microprobe. The results indicated that the characteristics of these films are strongly depended on the implanting voltage. The DLC films with lowest friction coefficient, longest wear life, and lowest surface roughness was achieved around -30 keV, which was thought to be the optimum implanting voltage in this study.

Original language	English
Pages (from-to)	74-77
Number of pages	4
Journal	Vacuum
Volume	89
Issue number	1
DOIs	https://doi.org/10.1016/j.vacuum.2011.10.015
State	Published - Mar 2013

Keywords

DLC films
Implanting voltage
PBII
Raman spectroscopy

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10.1016/j.vacuum.2011.10.015

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title = "Characterization of DLC films prepared by plasma-based ion implantation on AISI 321 steel",

abstract = "DLC films were prepared by plasma-based ion implantation (PBII) using acetylene as carbon source on AISI 321 steel substrate. The effect of implanting voltage on the characteristics of these films was investigated. The structures of the films were analyzed by Raman spectroscopy. The morphologies of the films were observed by atomic force microcopy (AFM), and the hardness of the films was measured with mechanical property microprobe. The results indicated that the characteristics of these films are strongly depended on the implanting voltage. The DLC films with lowest friction coefficient, longest wear life, and lowest surface roughness was achieved around -30 keV, which was thought to be the optimum implanting voltage in this study.",

keywords = "DLC films, Implanting voltage, PBII, Raman spectroscopy",

author = "Yujiang Wang and Xinxin Ma and Guangze Tang and Mingren Sun",

year = "2013",

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doi = "10.1016/j.vacuum.2011.10.015",

language = "英语",

volume = "89",

pages = "74--77",

journal = "Vacuum",

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TY - JOUR

T1 - Characterization of DLC films prepared by plasma-based ion implantation on AISI 321 steel

AU - Wang, Yujiang

AU - Ma, Xinxin

AU - Tang, Guangze

AU - Sun, Mingren

PY - 2013/3

Y1 - 2013/3

N2 - DLC films were prepared by plasma-based ion implantation (PBII) using acetylene as carbon source on AISI 321 steel substrate. The effect of implanting voltage on the characteristics of these films was investigated. The structures of the films were analyzed by Raman spectroscopy. The morphologies of the films were observed by atomic force microcopy (AFM), and the hardness of the films was measured with mechanical property microprobe. The results indicated that the characteristics of these films are strongly depended on the implanting voltage. The DLC films with lowest friction coefficient, longest wear life, and lowest surface roughness was achieved around -30 keV, which was thought to be the optimum implanting voltage in this study.

AB - DLC films were prepared by plasma-based ion implantation (PBII) using acetylene as carbon source on AISI 321 steel substrate. The effect of implanting voltage on the characteristics of these films was investigated. The structures of the films were analyzed by Raman spectroscopy. The morphologies of the films were observed by atomic force microcopy (AFM), and the hardness of the films was measured with mechanical property microprobe. The results indicated that the characteristics of these films are strongly depended on the implanting voltage. The DLC films with lowest friction coefficient, longest wear life, and lowest surface roughness was achieved around -30 keV, which was thought to be the optimum implanting voltage in this study.

KW - DLC films

KW - Implanting voltage

KW - PBII

KW - Raman spectroscopy

UR - https://www.scopus.com/pages/publications/84869079620

U2 - 10.1016/j.vacuum.2011.10.015

DO - 10.1016/j.vacuum.2011.10.015

M3 - 文章

AN - SCOPUS:84869079620

SN - 0042-207X

VL - 89

SP - 74

EP - 77

JO - Vacuum

JF - Vacuum

IS - 1

ER -

Characterization of DLC films prepared by plasma-based ion implantation on AISI 321 steel

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Keywords

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