Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods

Y. J. Guo; J. Zhang; C. Zhao; J. Y. Ma; H. F. Pang; P. A. Hu; F. Placido; D. Gibson; X. T. Zu; H. Y. Zu; Y. Q. Fu

doi:10.1016/j.materresbull.2013.04.072

Characterization and humidity sensing of ZnO/42° YX LiTaO₃ Love wave devices with ZnO nanorods

Y. J. Guo
, J. Zhang
, C. Zhao
, J. Y. Ma
, H. F. Pang
, P. A. Hu
, F. Placido
, D. Gibson
, X. T. Zu
, H. Y. Zu
, Y. Q. Fu^*

^*Corresponding author for this work

University of Electronic Science and Technology of China
University of the West of Scotland
Sichuan Institute of Piezoelectric and Acoustooptic Technology
Gas Sensing Solutions Ltd

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO ₃ were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO₃ to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

Original language	English
Pages (from-to)	5058-5063
Number of pages	6
Journal	Materials Research Bulletin
Volume	48
Issue number	12
DOIs	https://doi.org/10.1016/j.materresbull.2013.04.072
State	Published - 2013

Keywords

A. Nanostructures
A. Thin films
C. Electron microscopy
C. X-ray diffraction
D. Surface properties

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10.1016/j.materresbull.2013.04.072

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@article{27fd21e037ab4fa8bf43a997541e5309,

title = "Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods",

abstract = "Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO 3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.",

keywords = "A. Nanostructures, A. Thin films, C. Electron microscopy, C. X-ray diffraction, D. Surface properties",

author = "Guo, \{Y. J.\} and J. Zhang and C. Zhao and Ma, \{J. Y.\} and Pang, \{H. F.\} and Hu, \{P. A.\} and F. Placido and D. Gibson and Zu, \{X. T.\} and Zu, \{H. Y.\} and Fu, \{Y. Q.\}",

year = "2013",

doi = "10.1016/j.materresbull.2013.04.072",

language = "英语",

volume = "48",

pages = "5058--5063",

journal = "Materials Research Bulletin",

issn = "0025-5408",

publisher = "Elsevier Ltd",

number = "12",

}

TY - JOUR

T1 - Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods

AU - Guo, Y. J.

AU - Zhang, J.

AU - Zhao, C.

AU - Ma, J. Y.

AU - Pang, H. F.

AU - Hu, P. A.

AU - Placido, F.

AU - Gibson, D.

AU - Zu, X. T.

AU - Zu, H. Y.

AU - Fu, Y. Q.

PY - 2013

Y1 - 2013

N2 - Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO 3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

AB - Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO 3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.

KW - A. Nanostructures

KW - A. Thin films

KW - C. Electron microscopy

KW - C. X-ray diffraction

KW - D. Surface properties

UR - https://www.scopus.com/pages/publications/84885956873

U2 - 10.1016/j.materresbull.2013.04.072

DO - 10.1016/j.materresbull.2013.04.072

M3 - 文章

AN - SCOPUS:84885956873

SN - 0025-5408

VL - 48

SP - 5058

EP - 5063

JO - Materials Research Bulletin

JF - Materials Research Bulletin

IS - 12

ER -

Characterization and humidity sensing of ZnO/42° YX LiTaO₃ Love wave devices with ZnO nanorods

Abstract

Keywords

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