@inproceedings{fb3bdb60a13943728000390c2d51d76c,
title = "Characteristic of capillary discharge soft X-ray laser in Ne-like Ar",
abstract = "Ne-like Ar lasers operating at a wavelength of 46.9 nm have been developed by using of a three-coaxial-line Blumlein transmission line (BTL). The discharge system consists of a Marx generator with maximum charging voltage of 300kV, a Blumlein transmission line, as well as a pre-pulse circuit that provide maximum voltage of 20kV. Soft x-ray amplification in Ne-like Ar at 46.9nm with pulse energy of ∼10μJ and duration time of 2ns has been achieved. The plasma columns are pumped by a 20-26kA current pulse with 130ns half-cycle duration in a 3.1mm-diameter and 19cmlength capillary channels filled with pre-ionized Ar gas at pressure of 30-40Pa. The beam profile was observed to have an annular shape and the peak-to-peak divergence is about 4.5 mrad. This new type of short wavelength laser is of interest for numerous applications such as materials ablation and nanopatterning in micro-technology.",
keywords = "Capillary discharge, EUV source, X-ray laser, Z-pinch",
author = "Cheng, \{Y. L.\} and Zhang, \{X. Q.\} and Gou, \{H. G.\} and Zhu, \{Q. S.\} and Zhao, \{Y. P.\} and Y. Xie and Q. Wang",
year = "2007",
doi = "10.1117/12.782965",
language = "英语",
isbn = "9780819468819",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies",
note = "3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems ; Conference date: 08-07-2007 Through 12-07-2007",
}