Characteristic and application study of multi-cathodes metal plasma source

Zhiwen Xie; Langping Wang; Xiaofeng Wang; Jiuchun Yan; Lei Huang; Yang Lu

Characteristic and application study of multi-cathodes metal plasma source

Zhiwen Xie
, Langping Wang^*
, Xiaofeng Wang
, Jiuchun Yan
, Lei Huang
, Yang Lu

^*Corresponding author for this work

School of Materials Science and Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A new multiple-cathodes metal plasma source was designed. The plasma uniformity, duct bias voltage and current of the magnetic coils were studied and optimized. TiAlSiN composite coating was prepared on this equipment. The chemical composition, micro structure and mechanical properties of the coating were investigated by utilizing energy dispersive X-ray (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and nano-indentation measurement. The results revealed that the equipment can be used for preparing composite coating. TiAlSiN coating showed n-TiAlN/a-Si3N4 composite structure. In addition, the film showed high hardness (≥ 35 GPa).

Original language	English
Pages (from-to)	18-21
Number of pages	4
Journal	He Jishu/Nuclear Techniques
Volume	34
Issue number	1
State	Published - Jan 2011

Keywords

Composite coating
Hardness
Multiple-cathodes plasma source
Uniform

Cite this

@article{dea6014f87f6410a942ecf4790801eda,

title = "Characteristic and application study of multi-cathodes metal plasma source",

abstract = "A new multiple-cathodes metal plasma source was designed. The plasma uniformity, duct bias voltage and current of the magnetic coils were studied and optimized. TiAlSiN composite coating was prepared on this equipment. The chemical composition, micro structure and mechanical properties of the coating were investigated by utilizing energy dispersive X-ray (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and nano-indentation measurement. The results revealed that the equipment can be used for preparing composite coating. TiAlSiN coating showed n-TiAlN/a-Si3N4 composite structure. In addition, the film showed high hardness (≥ 35 GPa).",

keywords = "Composite coating, Hardness, Multiple-cathodes plasma source, Uniform",

author = "Zhiwen Xie and Langping Wang and Xiaofeng Wang and Jiuchun Yan and Lei Huang and Yang Lu",

year = "2011",

month = jan,

language = "英语",

volume = "34",

pages = "18--21",

journal = "He Jishu/Nuclear Techniques",

issn = "0253-3219",

publisher = "Science Press ",

number = "1",

}

TY - JOUR

T1 - Characteristic and application study of multi-cathodes metal plasma source

AU - Xie, Zhiwen

AU - Wang, Langping

AU - Wang, Xiaofeng

AU - Yan, Jiuchun

AU - Huang, Lei

AU - Lu, Yang

PY - 2011/1

Y1 - 2011/1

N2 - A new multiple-cathodes metal plasma source was designed. The plasma uniformity, duct bias voltage and current of the magnetic coils were studied and optimized. TiAlSiN composite coating was prepared on this equipment. The chemical composition, micro structure and mechanical properties of the coating were investigated by utilizing energy dispersive X-ray (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and nano-indentation measurement. The results revealed that the equipment can be used for preparing composite coating. TiAlSiN coating showed n-TiAlN/a-Si3N4 composite structure. In addition, the film showed high hardness (≥ 35 GPa).

AB - A new multiple-cathodes metal plasma source was designed. The plasma uniformity, duct bias voltage and current of the magnetic coils were studied and optimized. TiAlSiN composite coating was prepared on this equipment. The chemical composition, micro structure and mechanical properties of the coating were investigated by utilizing energy dispersive X-ray (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and nano-indentation measurement. The results revealed that the equipment can be used for preparing composite coating. TiAlSiN coating showed n-TiAlN/a-Si3N4 composite structure. In addition, the film showed high hardness (≥ 35 GPa).

KW - Composite coating

KW - Hardness

KW - Multiple-cathodes plasma source

KW - Uniform

UR - https://www.scopus.com/pages/publications/79952826847

M3 - 文章

AN - SCOPUS:79952826847

SN - 0253-3219

VL - 34

SP - 18

EP - 21

JO - He Jishu/Nuclear Techniques

JF - He Jishu/Nuclear Techniques

IS - 1

ER -

Characteristic and application study of multi-cathodes metal plasma source

Abstract

Keywords

Other files and links

Fingerprint

Cite this