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Chain length dependence of SAMs-assisted copper thermocompression bonding

  • Li Jia*
  • , Foo Qi Hui
  • , Ang Xiao Fang
  • , Wei Jun
  • , C. C. Wong
  • *Corresponding author for this work
  • Nanyang Technological University
  • Agency for Science, Technology and Research, Singapore

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Direct metal thermocompression bonding is one of the key approaches used in creating interconnections in many heterogeneous devices. It has been reported that by coating a monolayer of alkanethiols on metallic surfaces such as gold or copper prior to bonding, the bonding temperature required for forming joints can be significantly reduced. In this paper, room temperature copper bonding is demonstrated successfully with the help of the organic monolayers. We also found that all alkanethiol- coated copper (CnH2n+1SH, at n = 6, 11, 18) exhibited superior bond strength (>25MPa) compared to that of the uncoated copper (<23MPa) at bonding temperatures from 25° C to 80° C. Further investigation shows that bond strength of copper joints increases with alkanethiol chain length (C18>C11>C6), which contradicts our previous finding in gold. We attribute this discrepancy to the difference in hardness between the two substrates.

Original languageEnglish
Title of host publicationNEMS/MEMS Technology and Devices - Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, ICMAT 2009
Pages291-294
Number of pages4
DOIs
StatePublished - 2009
Externally publishedYes
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore, Singapore
Duration: 28 Jun 20093 Jul 2009

Publication series

NameAdvanced Materials Research
Volume74
ISSN (Print)1022-6680

Conference

ConferenceInternational Conference on Materials for Advanced Technologies, ICMAT 2009
Country/TerritorySingapore
CitySingpore
Period28/06/093/07/09

Keywords

  • Bond strength
  • Chain length
  • SAMs
  • Surface passivation

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