Abstract
Cathodic arc ion plating technology employs a solid source that generates field-induced arc discharge and obtains high-density electron flow to evaporate and ionize metal materials. It has a high plasma density and the largest rate of metal ionization among various ion plating technologies. Cathodic arc ion plating machines include small plane arc source ion plating machines, rectangular plane arc source ion plating machines, and cylindrical arc discharge ion plating machines. There are several methods to refine film structure, such as the electromagnetic coil + permanent magnet method, the double solenoid method, and the electromagnetic deflection method. In the cathodic arc ion plating technology, the arc discharge of argon ions can clean the workpiece surface and improve the adhesion between film and workpiece.
| Original language | English |
|---|---|
| Title of host publication | Modern Ion Plating Technology |
| Subtitle of host publication | Fundamentals and Applications |
| Publisher | Elsevier |
| Pages | 151-187 |
| Number of pages | 37 |
| ISBN (Electronic) | 9780323908337 |
| ISBN (Print) | 9780323908344 |
| DOIs | |
| State | Published - 1 Jan 2023 |
| Externally published | Yes |
Keywords
- Field-induced arc discharge
- argon arc discharge ion cleaning technology
- cylindrical arc source ion plating machine
- double solenoid method
- electromagnetic coil + permanent magnet method
- electromagnetic deflection method
- rectangular planar arc source ion plating machine
- small planar arc source ion plating machine
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