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Calibration of a 6-DOF parallel micromanipulator for nanomanipulation

  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Nanomanipulation is a key enabling technology for many nanometer scale applications. To realize the full 6-DOF nanomanipulation, parallel micromanipulators have manys advantages comparing to the serial ones. Due to the machining and assembly errors, kinematic calibration is necessary to improve the accuracy further. For the 3-limb 6-dof manipulator in this paper, the error model of it was first developed based on the inverse solutions. The scheme for detecting the positions and poses of the end-effector was also determined. The least square method was used to identify the main parameters of the parallel manipulator, and the identified dimensions were used to control the manipulator. The experiments results verify the effectiveness of the calibration processes.

Original languageEnglish
Title of host publicationINEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
Pages138-139
Number of pages2
DOIs
StatePublished - 2010
Event2010 3rd International Nanoelectronics Conference, INEC 2010 - Hongkong, China
Duration: 3 Jan 20108 Jan 2010

Publication series

NameINEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings

Conference

Conference2010 3rd International Nanoelectronics Conference, INEC 2010
Country/TerritoryChina
CityHongkong
Period3/01/108/01/10

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