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Calculation and analysis for stiffness of the thrust aerostatic bearing of ultra-precision machine tools

  • Lihua Lu*
  • , Ziqiang Zhao
  • , Yingchun Liang
  • , Longjiang Zhang
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The single point diamond turning (SPDT) lathe of vertical flying cutting milling style is one important ultra-precision machining method for Large-aperture optics. To realize ultra-precision machining with SPDT technology, the turning spindle of the machine tools should be with higher stiffness and stability. In this paper, based on finite element method (FEM), an iterative procedure is proposed and implemented to solve the fluid dynamic model and structure model for simulation the couple of air pressure and structure flexibility. Simulation results show that pressure in the air gap makes the plate deform and this deformation produced by the pressure adversely modifies the pressure distribution. Experimental results indicate that the method can predict the aerostatic spindle stiffness accurately, the prediction error is about 2.04%. These results show a relevant influence of the structural flexibility of the bearing on its static performance.

Original languageEnglish
Title of host publication5th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationAdvanced Optical Manufacturing Technologies
EditionPART 1
DOIs
StatePublished - 2010
Event5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Dalian, China
Duration: 26 Apr 201029 Apr 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
NumberPART 1
Volume7655
ISSN (Print)0277-786X

Conference

Conference5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Country/TerritoryChina
CityDalian
Period26/04/1029/04/10

Keywords

  • Aerostatic bearing
  • finite element analysis
  • fluid-structure interaction

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