Bias voltage and properties of magnetron sputtered niobium films

Jiangtao Cui; Xiubo Tian; Shiqin Yang

Bias voltage and properties of magnetron sputtered niobium films

Jiangtao Cui^*
, Xiubo Tian
, Shiqin Yang

^*Corresponding author for this work

Harbin Institute of Technology
Shenzhen Key Laboratory of Composite Materials

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Niobium films were grown by DC magnetron sputtering on CrNi₃Mo steel substrates. Its microstructures and mechanical properties were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and conventional probes. The results show that the negative bias voltages significantly affect its surface morphology and its mechanical properties. For example, at a bias of 150 V, the compact film has the highest erosion-resistance.

Original language	English
Pages (from-to)	67-71
Number of pages	5
Journal	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
Volume	28
Issue number	1
State	Published - Feb 2008
Externally published	Yes

Keywords

Bias voltage
Corrosion resistance
Niobium film
Structure

Cite this

@article{9128e637e706442189653d21077c780d,

title = "Bias voltage and properties of magnetron sputtered niobium films",

abstract = "Niobium films were grown by DC magnetron sputtering on CrNi3Mo steel substrates. Its microstructures and mechanical properties were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and conventional probes. The results show that the negative bias voltages significantly affect its surface morphology and its mechanical properties. For example, at a bias of 150 V, the compact film has the highest erosion-resistance.",

keywords = "Bias voltage, Corrosion resistance, Niobium film, Structure",

author = "Jiangtao Cui and Xiubo Tian and Shiqin Yang",

year = "2008",

month = feb,

language = "英语",

volume = "28",

pages = "67--71",

journal = "Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology",

issn = "1672-7126",

publisher = "Chinese Vacuum Society",

number = "1",

}

TY - JOUR

T1 - Bias voltage and properties of magnetron sputtered niobium films

AU - Cui, Jiangtao

AU - Tian, Xiubo

AU - Yang, Shiqin

PY - 2008/2

Y1 - 2008/2

N2 - Niobium films were grown by DC magnetron sputtering on CrNi3Mo steel substrates. Its microstructures and mechanical properties were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and conventional probes. The results show that the negative bias voltages significantly affect its surface morphology and its mechanical properties. For example, at a bias of 150 V, the compact film has the highest erosion-resistance.

AB - Niobium films were grown by DC magnetron sputtering on CrNi3Mo steel substrates. Its microstructures and mechanical properties were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and conventional probes. The results show that the negative bias voltages significantly affect its surface morphology and its mechanical properties. For example, at a bias of 150 V, the compact film has the highest erosion-resistance.

KW - Bias voltage

KW - Corrosion resistance

KW - Niobium film

KW - Structure

UR - https://www.scopus.com/pages/publications/40749142478

M3 - 文章

AN - SCOPUS:40749142478

SN - 1672-7126

VL - 28

SP - 67

EP - 71

JO - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

JF - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

IS - 1

ER -

Bias voltage and properties of magnetron sputtered niobium films

Abstract

Keywords

Other files and links

Fingerprint

Cite this