@inproceedings{ee56c642feae4dd6b22f78458bf93367,
title = "Bending behavior of flexible crystalline silicon nanomembrane photonic crystal microcavities",
abstract = "We demonstrated a flexible crystalline silicon nanomembrane photonic crystal microcavity with a quality factor of 22,000 and experimentally studied its bending behavior.",
keywords = "Films, Microcavities, Photonic crystals, Photonics, Polyimides, Silicon, Strain",
author = "Xiaochuan Xu and Harish Subbaraman and Swapnajit Chakravarty and Chen, \{Ray T.\}",
note = "Publisher Copyright: {\textcopyright} 2015 OSA.; Conference on Lasers and Electro-Optics, CLEO 2015 ; Conference date: 10-05-2015 Through 15-05-2015",
year = "2015",
month = aug,
day = "10",
language = "英语",
series = "Conference on Lasers and Electro-Optics Europe - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 Conference on Lasers and Electro-Optics, CLEO 2015",
address = "美国",
}