@inproceedings{2d6a1f06352247688b0f911a8a83fe0c,
title = "Bending behavior of flexible crystalline silicon nanomembrane photonic crystal microcavities",
abstract = "We demonstrated a flexible crystalline silicon nanomembrane photonic crystal microcavity with a quality factor of 22,000 and experimentally studied its bending behavior.",
author = "Xiaochuan Xu and Harish Subbaraman and Swapnajit Chakravarty and Chen, \{Ray T.\}",
year = "2015",
month = may,
day = "4",
doi = "10.1364/CLEO\_SI.2015.SF2H.3",
language = "英语",
series = "CLEO: Science and Innovations, CLEO-SI 2015",
publisher = "Optical Society of America (OSA)",
pages = "2267",
booktitle = "CLEO",
note = "CLEO: Science and Innovations, CLEO-SI 2015 ; Conference date: 10-05-2015 Through 15-05-2015",
}