Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity

Peng Cheng Hu; Peng Chen; Xue Mei Ding; Jiu Bin Tan

doi:10.1364/AO.53.005448

Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity

Peng Cheng Hu^*
, Peng Chen
, Xue Mei Ding
, Jiu Bin Tan

^*Corresponding author for this work

School of Instrumentation Science and Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept within ±36 pm, and the interferometer proposed was immune from thermal error.

Original language	English
Pages (from-to)	5448-5452
Number of pages	5
Journal	Applied Optics
Volume	53
Issue number	24
DOIs	https://doi.org/10.1364/AO.53.005448
State	Published - 20 Aug 2014

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title = "Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity",

abstract = "A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept within ±36 pm, and the interferometer proposed was immune from thermal error.",

author = "Hu, \{Peng Cheng\} and Peng Chen and Ding, \{Xue Mei\} and Tan, \{Jiu Bin\}",

note = "Publisher Copyright: {\textcopyright} 2014 Optical Society of America.",

year = "2014",

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doi = "10.1364/AO.53.005448",

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AU - Hu, Peng Cheng

AU - Chen, Peng

AU - Ding, Xue Mei

AU - Tan, Jiu Bin

PY - 2014/8/20

Y1 - 2014/8/20

N2 - A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept within ±36 pm, and the interferometer proposed was immune from thermal error.

AB - A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept within ±36 pm, and the interferometer proposed was immune from thermal error.

UR - https://www.scopus.com/pages/publications/84942370376

U2 - 10.1364/AO.53.005448

DO - 10.1364/AO.53.005448

M3 - 文章

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JO - Applied Optics

JF - Applied Optics

IS - 24

ER -

Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity

Abstract

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