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Automatic microassembly robot for MEMS

  • Harbin Institute of Technology

Research output: Contribution to journalArticlepeer-review

Abstract

The structure of the robot system for microelectromechanical system (MEMS) automated assembly is presented. Key technologies that comprise the assembly system are discussed, including the technologies of coarse-to-fine positioning, micro-vision system, the design of micromanipulator, system calibration and tasks planning. Integrated with the key technologies, a micromanipulation system was developed to complete the automated assembly of the miniaturized planetary reducer with an outer diameter of 2 mm. By fusing the micro-visual and micro-force feedback data and applying special assembly strategy, the automated assembly of three planetary gears within 2.5 minutes is validated by experiment.

Original languageEnglish
Pages (from-to)1013-1016
Number of pages4
JournalHarbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology
Volume38
Issue number7
StatePublished - Jul 2006

Keywords

  • Automated assembly
  • Microassembly robot
  • Microelectromechanical system
  • Miniaturized planetary reducer

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