TY - GEN
T1 - Automatic characterization method for the quasi-planar freeform surface by atmospheric pressure plasma processing
AU - Ji, Peng
AU - Li, Duo
AU - Jin, Yuan
AU - Wang, Bo
N1 - Publisher Copyright:
© COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
PY - 2022
Y1 - 2022
N2 - With the vertical fluctuation of small amplitudes, the quasi-planar freeform surface is essentially a plane superposed by microstructure with several micrometers. In practical, it's widely used to improve the optical performance. However, its form accuracy highly depends on the processing iteration with all kinds of computer controlled optical surfacing (CCOS) technology. This paper presents an automatic characterization method for the quasi-planar freeform surface by atmospheric pressure plasma processing (APPP). Firstly, the principle of APPP and fabrication of the typical quasi-planar freeform surface are introduced. Based on this, an automatic characterization method is developed to eliminate the misalignment between the measured and designed surface, which serves for the form error evaluation and removal generation of next processing step. Finally, the simulation and experiment were conducted to demonstrate the effectiveness of the proposed method, which indicates that it can provide the reliable feedback for the fabrication of quasi-planar freeform surface.
AB - With the vertical fluctuation of small amplitudes, the quasi-planar freeform surface is essentially a plane superposed by microstructure with several micrometers. In practical, it's widely used to improve the optical performance. However, its form accuracy highly depends on the processing iteration with all kinds of computer controlled optical surfacing (CCOS) technology. This paper presents an automatic characterization method for the quasi-planar freeform surface by atmospheric pressure plasma processing (APPP). Firstly, the principle of APPP and fabrication of the typical quasi-planar freeform surface are introduced. Based on this, an automatic characterization method is developed to eliminate the misalignment between the measured and designed surface, which serves for the form error evaluation and removal generation of next processing step. Finally, the simulation and experiment were conducted to demonstrate the effectiveness of the proposed method, which indicates that it can provide the reliable feedback for the fabrication of quasi-planar freeform surface.
KW - Atmospheric pressure plasma processing
KW - Characterization method
KW - Quasi-planar freeform surface
UR - https://www.scopus.com/pages/publications/85125475699
U2 - 10.1117/12.2617519
DO - 10.1117/12.2617519
M3 - 会议稿件
AN - SCOPUS:85125475699
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Seventh Asia Pacific Conference on Optics Manufacture, APCOM 2021
A2 - Tan, Jiubin
A2 - Luo, Xiangang
A2 - Huang, Ming
A2 - Kong, Lingbao
A2 - Zhang, Dawei
PB - SPIE
T2 - 7th Asia Pacific Conference on Optics Manufacture, APCOM 2021
Y2 - 28 October 2021 through 31 October 2021
ER -