Assembled comb-drive XYZ-microstage with DPPH sample for the 3D scanning of magnetic resonance force microscope

This paper presents an assembled comb-drive XYZ-microstage with large displacements for the scanning of magnetic resonance force microscopy (MRFM) at cryogenic environment. The scanning XYZ-microstage with little affection to the thermal variation and magnetic fields is required. The comb-drive XYZ-microstage is assembled with an XY-microstage, two Z-actuators and a silicon base substrate using a microassembly technology. For measurements, a sample of 1, 1-Diphenyl-2-picrylhydrazyl radical (DPPH) is glued onto the assembled XYZ-microstage. The imaging system is consisted of the scanning XYZ-microstage with DPPH sample, a sensitive cantilever sensor with a small magnetic particle, a fiber-optic interferometer to detect the vibration of the cantilever and a radio frequency (RF) coil. The measurements are performed at low pressure in a vacuum chamber. The vibration of the cantilever sensor based on magnetic force from electron spin resonance (ESR) spectroscopy can be detected through adjusting the magnetic field intensity of the RF coil.