@inproceedings{454c3d08bc0c4d4ca612c2b1d7d07965,
title = "Approach of decreasing effect of temperature on positioning accuracy of ultra-precision micro-feed system",
abstract = "Ultra-precision flexure-hinge guided micro-feed system driven by piezoelectric actuator was applied in many fields in which precise motion was needed. Temperature effects on positioning accuracy of system are analyzed. The temperature measurement and control system are described for the compensation of temperature errors on micro-feed stage and interferometer measurement. The temperature control system kept temperature variation of 0.1°C at 20°C, and 0.05°C temperature drift, which can meet the limit of precise positioning accuracy of micro-feed system.",
keywords = "Micro-feed stage, Piezoelectric acuator, Temperature",
author = "Li Zhong and Zhenliang Ding and Feng Yuan",
year = "2006",
doi = "10.1109/NEMS.2006.334894",
language = "英语",
isbn = "1424401402",
series = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
pages = "779--783",
booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",
}