Abstract
This chapter provides a comprehensive review on plasma immersion ion implantation and deposition (PIIID) technique to enhance the surface properties of industrial components, including irregular shapes and batch treatment. The application of PIIID performed on GCr15, 2Cr13 and bearing components, batch treatment of industrial components as well as simulation on the sheath around sophisticated-shape targets are focused. We designed a rotating target holder and successfully developed several novel methods to improve the dose uniformity on industrial components to obtain commercial applications of the PIIID technique.
| Original language | English |
|---|---|
| Title of host publication | Materials for Land, Air, and Space Transportation |
| Publisher | CRC Press |
| Pages | 233-259 |
| Number of pages | 27 |
| ISBN (Electronic) | 9781040253953 |
| ISBN (Print) | 9781032478548 |
| DOIs | |
| State | Published - 1 Jan 2024 |
Keywords
- And Diamond-like carbon
- Batch treatment
- Bearing steel
- Glow discharge
- Magnetron sputtering deposition
- MoS2/Ti multilayer
- Multilayers
- Plasma immersion ion implantation and deposition (PIII&D)
- Pulsed cathodic arc plasma source
- TiAlSiN nanocomposite coating
- TiN/ZrO
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