Applications of integrated auxiliary methods based on deformation analysis for micro-milling thin-walled slot on micro-neck

This machined micro-scaled component with micro-neck and thin wall is mainly used in micro-electro-mechanism accelerometer which serves for aviation and military. Deformations happen in the micro-milling of thin-walled slot on micro-neck due to their low stiffness. Besides, the component is demanded to be put into mass production. These components should be thus machined with high surface quality, high efficiency, less burr, and low damage. Aiming at these problems, a novel integrated auxiliary method was proposed by theoretical analysis. It was analyzed and employed to enhance the machining stability and to decrease exit burr when the milling force is applied on the low-stiffness structures. With the method, the processing efficiency can be accepted. Some experiments were carried out to verify the proposed auxiliary method, and a 10-μm thickness slot on micro-neck was machined. The experimental results were discussed and reflected the performance of micro-milling of the micro-structured components with this integrated auxiliary method.