Application of a novel capacitive sensor in precise positioning systems

Tao Chen; Liguo Chen; Mingqiang Pan; Lining Sun

doi:10.1109/ICIEA.2011.5975867

Application of a novel capacitive sensor in precise positioning systems

Tao Chen^*
, Liguo Chen
, Mingqiang Pan
, Lining Sun

^*Corresponding author for this work

School of Mechatronics Engineering

Soochow University
Chinese Academy of Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10m, with resolution of 5nm.

Original language	English
Title of host publication	Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011
Pages	1712-1715
Number of pages	4
DOIs	https://doi.org/10.1109/ICIEA.2011.5975867
State	Published - 2011
Event	2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011 - Beijing, China Duration: 21 Jun 2011 → 23 Jun 2011

Publication series

Name	Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011

Conference

Conference	2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011
Country/Territory	China
City	Beijing
Period	21/06/11 → 23/06/11

Keywords

capacitive displacement sensor
comb-finger capacitance
microelectromechanical systems (MEMS)
nano-positioning stage

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10.1109/ICIEA.2011.5975867

Cite this

Chen, T., Chen, L., Pan, M., & Sun, L. (2011). Application of a novel capacitive sensor in precise positioning systems. In Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011 (pp. 1712-1715). Article 5975867 (Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011). https://doi.org/10.1109/ICIEA.2011.5975867

@inproceedings{b8ad1b4d7d87498685c609ce6271fc7e,

title = "Application of a novel capacitive sensor in precise positioning systems",

abstract = "This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10m, with resolution of 5nm.",

keywords = "capacitive displacement sensor, comb-finger capacitance, microelectromechanical systems (MEMS), nano-positioning stage",

author = "Tao Chen and Liguo Chen and Mingqiang Pan and Lining Sun",

year = "2011",

doi = "10.1109/ICIEA.2011.5975867",

language = "英语",

isbn = "9781424487554",

series = "Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011",

pages = "1712--1715",

booktitle = "Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011",

note = "2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011 ; Conference date: 21-06-2011 Through 23-06-2011",

}

Chen, T, Chen, L, Pan, M & Sun, L 2011, Application of a novel capacitive sensor in precise positioning systems. in Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011., 5975867, Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011, pp. 1712-1715, 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011, Beijing, China, 21/06/11. https://doi.org/10.1109/ICIEA.2011.5975867

Application of a novel capacitive sensor in precise positioning systems. / Chen, Tao; Chen, Liguo; Pan, Mingqiang et al.
Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011. 2011. p. 1712-1715 5975867 (Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Chen, Tao

AU - Chen, Liguo

AU - Pan, Mingqiang

AU - Sun, Lining

PY - 2011

Y1 - 2011

N2 - This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10m, with resolution of 5nm.

AB - This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10m, with resolution of 5nm.

KW - capacitive displacement sensor

KW - comb-finger capacitance

KW - microelectromechanical systems (MEMS)

KW - nano-positioning stage

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DO - 10.1109/ICIEA.2011.5975867

M3 - 会议稿件

AN - SCOPUS:80052248083

SN - 9781424487554

T3 - Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011

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EP - 1715

BT - Proceedings of the 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011

T2 - 2011 6th IEEE Conference on Industrial Electronics and Applications, ICIEA 2011

Y2 - 21 June 2011 through 23 June 2011

ER -

Application of a novel capacitive sensor in precise positioning systems

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