@inproceedings{5d55a4a6a3e14dd0916d20a9f539357e,
title = "Analysis of the measured method for scattering properties of high-reflection coating",
abstract = "Integral scattering is one of the important loss components of high-reflection optical thin films, so suppressing integral scattering can enhance the reflectance of high-reflection coating. Using integrating sphere is the important method of the integral scattering measurement of high reflection coatings. The paper introduced the measurement method and apparatus of integral scattering for single-wavelength at incident angle of 45deg by analyzing the principle of integrating sphere. Besides the important error sources and measurement accuracy of the integral scattering were analyzed. High-reflection coating for single wavelength onto fused silica substrate at incident angle of 45deg was manufactured by ion beam sputtering deposition and integral scattering apparatus was used to measure integral scattering of high-reflection coating. Finally by comparison of the experimental result and the value of scattering theory, we achieved the practical measurement errors origin that and established the foundation of scattering loss analysis for the ultra low losses high-reflection coating.",
keywords = "Diffuse reflection, Integral scattering, Integrating sphere, Measurement error",
author = "Liu Huasong and Luo Zheng and Wang Zhanshan and Ji Yiqin and Fan Yongkai and Fan Rongwei",
year = "2011",
doi = "10.1117/12.888309",
language = "英语",
isbn = "9780819485687",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Seventh International Conference on Thin Film Physics and Applications",
note = "7th International Conference on Thin Film Physics and Applications ; Conference date: 24-09-2010 Through 27-09-2010",
}